Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding

In this paper, we present a technology for the batch-fabrication of fluidic devices which combines polymer and metal layers. The structures are fabricated by means of two-layer lithography and SU-8-based wafer bonding technique. The combination of SU-8 and metal layers allows the fabrication of “2(1/2)”-dimensional fluidic structures. We realized different types of micromixers for the investigation of chemical reactions by time resolved FTIR-spectroscopy, a flow-through-cell for IR-detection in capillary electrophoresis (CE) and a CE device with integrated capillary. © 2004 Elsevier B.V. All rights reserved.